НАУЧНАЯ БИБЛИОТЕКА - РЕФЕРАТЫ - Design of micro accelerometer

Design of micro accelerometer

Table of content

• Introduction
• Static model analysis
• Proof mass
• Suspension beams
• Static deflection
• Residual stress and Poisson's ratio
• Spring constants
• Strain under acceleration 100 g and -100g
• Sensitivity
• Thermal noise
• Resolution due to the ADC
• Maximum acceleration
• Dynamic model analysis
• Etching time
• Coefficients of basic equations
• Natural frequencies
• Damping ratios
• Cut-off frequencies and squeeze numbers
• Sensor system simulation
• Equivalent circuits
• Stability
• Discussion

Introduction

In this work possible design of accelerometer, which can be produced using MOSIS 2 poly and 2 metal process, will be considered. The not in scale sketch of accelerometer is presented in Fig. 1. To etch silicon under the proof mass post-process isotropic etching will be applied and some additional mass of Al will added by wire bonding in order to make total mass 10 times of the initial mass.

Static model analysis

Proof mass

To make seismic mass of sensor as big as possible we should use all available layers. All such layers are listed in Table 1.